Precision Rotation Stage
Newport Corp. offers the compact, high torque RGV100HL high-speed precision rotation stage. Developed to accelerate loads having higher rotational inertia, the stage is compatible with Newport’s XPS-DRV02 driver.
By integrating the bearings with the motor, the stage’s footprint is 115 mm by 115 mm. A precision glass scale encoder guarantees 0.0003 degrees repeatability and 0.0001 degree minimum incremental motion. The brushless DC torque motor with rare earth magnets optimizes the available torque to deliver rapid point-to-point motions. Other features include 360 degree travel with 0.01 degree on-axis accuracy, a 4-point contact ball bearing design, and a 30 mm diameter through-hole for routing of cable and vacuum lines.
The RGV100HL is intended for applications requiring fast response and for tasks that require moving larger platens. It is suitable for semiconductor wafer inspection and metrology, laser micromachining, micro-robotics, motion simulators, rate tables and simulators, sensor calibration, and MEMs production.